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Prof. Dr.-Ing. Christian Boit


Head of the department of Semiconductor Devices
since July 2002

Phone: +49 30 314-25520
Fax: +49 30 314-29761
Room: E 103
E-Mail: christian.boit[AT]tu-berlin.de

Google scholar profile (Link)


  • Prof. Dr. Christian Boit is head of the semiconductor device department, an institution for research and development of equipment and software application in the areas device simulation, technology, characterization, reliability and focus on failure analysis, offering also training and commercial analytical service on backside techniques.
  • He received the diploma in physics and the PhD in electrical engineering on power devices from the Berlin University of Technology.
  • In 1986 he joined Siemens AG's Research laboratories for semiconductor electronics in Munich and has been pioneer on photoemission, 1990 he participated in the joint IBM-Siemens 64M DRAM development team in East Fishkill NY (USA).
  • He returned 1993 to the Siemens semiconductor group as failure analysis manager, has pushed many projects on leading edge techniques, and has been director of failure analysis in InfineonTechnologies AG, Munich until 2002, responsible for the Infineon analysis tasks, the F/A roadmap and coordination of all F/A groups in the company including best practise benchmark activities.
  • He has contributed to books, is author of several invited and altogether more than 50 publications and contributions to international conferences on various topics of technology and electrical/physical analysis of semiconductors, with Photoemission as a center of gravity. On this topic he received 1993 the VDE-Award in Frankfurt/M. and is a lecturer on ISTFA's Workshop.
  • He is member at large of the EDFAS board of directors and chairman of the EDFAS Publication Committee.
  • He was part in the Organization Committee of the conference ISTFA, the world's premier event in Electronic Device Failure Analysis, 2002 as General Chair.
  • He is member of VDE (German Society of Electrical Engineering) and head of their department 8.5, Quality and Reliability of Microelectronics, founding member of the board of the European Failure Analysis Network EUFANET and has contributed to the Microelectronics Failure Analysis broadcast course of the University New Mexico, Albuquerque.
  • Prof. Boit is member of the Editorial Board of Future Fab International and the Business Briefings.


A. Teodoreanu and F. Friedrich and L. Korte and R. Leihkauf and M. Kittler and B. Rech and C. Boit (2013). 2D simulations of the grain boundary light beam induced current (GB-LBIC) technique on polycrystalline silicon thin film. Proceedings on 28th European Photovoltaic Solar Energy Conference and Ehibition (EU PVSEC 2013). WIP Munich, 2666-2670.

C. Boit (2012). Photon Emission: A Technique Supposed to Fade Is Dying Really Hard. Electronic Device Failure Analysis, 46-47.

T. Breuer and U. Kerst and C. Boit and E. Langer and H. Ruelke and A. Fissel (2012). Conduction and material transport phenomena of degradation in electrically stressed ultra low-k dielectric before breakdown. Journal of Applied Physics, 124103-1-10.

J. Dietrich and D. Abou-Ras and T. Rissom and T. Unold and H. Schock and C. Boit (2012). Compositional Gradients in Cu(InGa)Se2 Thin Films for Solar Cells and Their Effects on Structural Defects. IEEE Journal of Photovoltaics, 364-370.

A. Glowacki and C. Boit and P. Perdu (2012). Optimum Si thickness for backside detection of photon emission using Si-CCD. Microelectronics Reliability, 2031-2034.

C. Pagano and C. Boit and A. Glowacki and R. Leihkauf and Y. Yokoyama (2012). Comparison of FET-optical modulation for 1300 nm and 1064 nm Laser sources. Microelectronics Reliability, 2024-2030.

C. Boit and A. Glowacki and C. Pagano and U. Kerst and Y. Yokoyama (2012). Quantitative Aspects of Optical IC Debug Using State-of-the Art Backside Preparation. Proc. IEEE IPFA 2012. ASM int., 1-6.

M. Boostandoost and X. Ycaza and R. Leihkauf and U. Kerst and C. Boit (2012). Challenges for parametric analysis of the solar cells using failure analysis technique developed for the microelectronics. Conference Proceedings from the 38th Int. Symp. for Testing and Failure Analysis (ISTFA 2012). ASM International, 255-263.

A. Glowacki and C. Boit and Y. Yokoyama and P. Perdu (2012). Photon emission spectra of FETs as obtained by InGaAs detector. Conference Proceedings from the 38th Int. Symp. for Testing and Failure Analysis (ISTFA 2012). ASM International, 123-125.

C. Helfmeier and C. Boit and U. Kerst (2012). On charge sensors for FIB attack detection. Proceedings of International Symposium on Hardware-Oriented Security and Trust (HOST) 2012. IEEE press, 128-133.

R. Di Giacomo and G. Landi and C. Boit and H. Neitzert (2012). Monitoring of the formation of a photosensitive device by electric breakdown of an impurity containing oxide in a MOS capacitor. SPIE Proceedings - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V

C. Boit and M. Boostandoost and F. Friedrich and A. Glowacki (2011). Testing and failure analysis of thin film solar cells. Phys. Status Solidi C, 3005-3008.

M. Boostandoost and F. Friedrich and U. Kerst and C. Boit and S. Gall and Y. Yokoyama (2011). Characterization of poly-Si thin-film solar cell functions and parameters with IR optical interaction techniques. Journal of Materials Science: Materials in Electronics, 1553-1579.

S. Brahma and A. Glowacki and R. Leihkauf and C. Boit (2011). Laser induced impact ionization effect in MOSFET during 1064 nm laser stimulation. Microelectronics Reliability, 1632-1636.

P. Ivo and A. Glowacki and E. Bahat-Treidel and R. Lossy and J. Würfl and C. Boit and G. Tränkle (2011). Comparative study of alGaN/GaN HEMTS robustness versus buffer design variations by applying Electroluminescence and electrical measurements. Microelectronics Reliability, 217-223.

M. Boostandoost and F. Friedrich and U. Kerst and U. Boit and S. Gall (2011). Investigation of Enhanced Photocurrent at the Grain Boundary of Thin Film Polycrystalline Silicon Solar Cells by Infrared LBIC. 26th European Photovoltaic Solar Energy Conference. WIP-Munich.de, 2791-2795.

M. Boostandoost and A. Glowacki and O. Bakaeva and U. Kerst and C. Boit (2011). Can illuminated IV-characteristics of micro-regions in solar cells be measured by laser-induced stimulation?. Proceedings of the 37th International Symposium for Testing and Failure Analysis (ISTFA 2011). ASM International, 330-335.

J. Dietrich and D. Abou-Ras and T. Rissom and T. Unold and H. Schock and C. Boit (2011). Effect of compositional gradients on structural defects in Cu(In,Ga)Se2 thin films for solar cells. Proceedings of 37th IEEE Photovoltaic Specialists Conference (PVSC 2011). IEEE press, 343-347.

U. Kindereit and O. Mutihac and C. Boit and B. Tillack (2011). Spectral resolution of photon emission from SiGe:C heterojunction bipolar transistors (HBTs). Proceedings of the 49th International Reliability Physics Symposium (IRPS 2011). IEEE print, 514-519.

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Technische Universität Berlin
Department of Semiconductor Devices
sec. E4
Einsteinufer 19
10587 Berlin